Custom Pneumatic Manifold? Machine Guarding? OEM Product Development? Product Test Fixture? Small Single Operator Semi-Automated Assembly Station? 
Our engineers at HeiTek developed an automatic wafer washing system that was designed to improve process accuracy, reduce wafer handling, and minimize accidents and free operators from constant monitoring over extended periods of operation. The automated wafer washing system was designed to be easy to assemble and install into our customer's existing wafer washing bath tank enclosure. This system automates the manual task of agitating and moving wafer boats between baths after each bath time has lapsed. Upon completion of the selected process the boat handler returns to the home position located over the second bath, and rotates the boat into an easy to load position for the operator. Process times and bath agitation recipes were easy to change and load into the PLC through an HMI. |
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